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IEC 62047-21 Ed. 1.0 b:2014
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IEC 62047-21 Ed. 1.0 b:2014 Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
standard by International Electrotechnical Commission, 06/19/2014
Full Description
IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.
M00007872
2021-02-22
New product
IEC 62047-21 Ed. 1.0 b:2014 Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
standard by International Electrotechnical Commission, 06/19/2014